| 发明名称 |
METHOD AND SYSTEM FOR SYNCHRONIZING CONTROL LIMIT AND EQUIPMENT PERFORMANCE |
| 摘要 |
<p>A method system for synchronizing a control chart of an SPC system and equipment performance has a chart model ( 22 ) with new chart properties; a method for calculating a control limit based on a statistical deviation, a synchronization frequency for setting a time for reviewing new data gathered by the SPC system, and a process catalog for categorizing all control charts that control the same process step, such that the control charts are organized for assignment of the same performance based control limit calculated by using statistics formed by data for control limit values of the control charts.</p> |
| 申请公布号 |
SG109548(A1) |
申请公布日期 |
2005.03.30 |
| 申请号 |
SG20040004397 |
申请日期 |
2004.08.12 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
SHUI-TIEN, LIN;HUI-CHEN, CHU;HUI-WEN, YANG;FU-CHING, YANG |
| 分类号 |
G05B17/00;G05B19/418;G06F19/00 |
主分类号 |
G05B17/00 |
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