| 摘要 |
An actuator is formed by using at least one flexure (102, 104, 106 and 108; 140, 142, 144 and 146; and 164) that is continuously flexible between a rigid connection to a stator (112) and a rigid connection to a translator (110; 158; and 160). The one or more continuously flexible flexures provide a long range of translator motion when combined with an electrostatic levitation arrangement. In selected embodiments, the flexures that are continuously flexible are straight beam flexures, so as to provide a high degree of stiffness. In other embodiments, the flexures are pre-bent to provide a longer switching throw from a relaxed state. Where the translator is required to be displaced in a generally straight-line direction, some off-axis displacement will occur, but is preferably accompanied by a stepping of a levitation voltage pattern. In another embodiment one and only one straight beam flexure is used and the levitator is caused to rotate about a rotational axis that is intersected by the one straight beam flexure. <IMAGE> |
