| 发明名称 |
Purgeable container |
| 摘要 |
<p>A container having two ports; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of a dispense conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent and or vacuum; a second valve connected to a push gas conduit and a second port.</p> |
| 申请公布号 |
EP1519101(A2) |
申请公布日期 |
2005.03.30 |
| 申请号 |
EP20040022387 |
申请日期 |
2004.09.21 |
| 申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
STEIDL, THOMAS ANDREW;VIVANCO, GILDARDO;BIRTCHER, CHARLES MICHAEL |
| 分类号 |
B01J4/00;F17C13/04;B08B9/00;B67D99/00;C23C16/44;C23C16/455;F16K11/10;H01L21/02;H01L21/205;H01L21/304;(IPC1-7):F17C13/04 |
主分类号 |
B01J4/00 |
| 代理机构 |
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代理人 |
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