METHOD OF APPARATUS OF VIBRATION ISOLATION, IN PARTICULAR FOR ELECTRON BEAM METROLOGY TOOLS

摘要

A vibration isolation method and a vibration isolation apparatus for electron beam measuring device are provided to efficiently isolate mechanical vibrations which are based on acoustic noises, by actively modifying the position of a chuck in accordance with the displacement between the specimen and the measuring device. A vibration isolation apparatus comprises an external structure(2) equipped with a measuring device(1); and a chuck for supporting a specimen so as to permit the measuring device to perform a measuring operation on the specimen. The chuck is coupled to one or more active type vibration isolation units for compensating for a relative displacement between the specimen and the measuring device.