发明名称 |
Non-evaporable getter multilayer deposits obtained by cathodic deposition and process for their manufacturing |
摘要 |
<p>Disclosed are getter multilayers formed of at least a layer (12) of a non-evaporable getter alloy having a low activation temperature over a layer (11) of a different non-evaporable getter material having high specific surface, both obtained by cathodic deposition; the deposits of the invention show better gas sorbing characteristics and activation temperature lower than those of deposits made up of a single material. The process for manufacturing these deposits is also disclosed. <IMAGE></p> |
申请公布号 |
EP1518599(A2) |
申请公布日期 |
2005.03.30 |
申请号 |
EP20040425406 |
申请日期 |
2004.06.01 |
申请人 |
SAES GETTERS S.P.A. |
发明人 |
CONTE, ANDREA;MORAJA, MARCO |
分类号 |
C23C14/16;B01J20/02;B01J20/32;B32B15/02;C22C5/04;C22C27/00;C22C27/02;C23C14/14;C23C14/34;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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