发明名称 SEMICONDUCTOR FORCE SENSOR
摘要 <p>The present invention provides a semiconductor force sensor capable of preventing a diaphragm section (37) from being damaged and capable of measuring accurately a force applied thereto in a direction orthogonal to the diaphragm section (37). The semiconductor sensor comprises a semiconductor force sensor element (31) and force transmitting means for applying the force to be measured to the diaphragm section (37) of the semiconductor force sensor element (31). The force transmitting means is constituted by a sphere (33) having rigidity. A through hole (63) is formed in an opposed wall section (55) at a location facing the central portion of the diaphragm section (37) so as to pass through the opposed wall section (55) in a direction toward the diaphragm section (37). The through hole (68) is so shaped as to allow part of the sphere (33) to face an outside of the opposed wall section (55) and as to receive part of the remainder of the sphere (38) in such a manner that the sphere (33) can move only in a direction orthogonal to the diaphragm section (37) and can rotate on the central portion of the diaphragm section (37). &lt;IMAGE&gt;</p>
申请公布号 EP1519173(A1) 申请公布日期 2005.03.30
申请号 EP20030717576 申请日期 2003.04.14
申请人 HOKURIKU ELECTRIC INDUSTRY CO., LTD. 发明人 HIROSE, SHIGERU;SAWAMURA, HIROYUKI;ANDO, MASATO;MOTOKI, YOSHIMITSU
分类号 G01L1/18;H01L29/84;(IPC1-7):G01L1/18 主分类号 G01L1/18
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