发明名称 A METHOD FOR DETECTION OF MICROMETRIC AND SUB-MICROMETRIC IMAGES BY MEANS OF IRRADIATION OF A MASK OR OF A BIOLOGICAL SPECIMEN WITH IONIZING RADIATION
摘要 Described herein is a method for detection of micrometric and sub-micrometric images with high resolution and high dynamics contrast, and suited for enabling microradiography, x-ray microscopy and the production of coloured configurations in dielectric materials. The method consists of radiation of energy comprised between 20 and 2000 eV for irradiating a mask or a biological specimen and use of a detector consisting of LiF in the form of a crystal or a film. The power of the radiation released in the LiF detector during exposure is preferably >=10 mW/cm<SUP>3</SUP>.
申请公布号 EP1518108(A1) 申请公布日期 2005.03.30
申请号 EP20030741078 申请日期 2003.06.27
申请人 ENTE PER LE NUOVE TECNOLOGIE, L'ENERGIA E L'AMBIENTE - ENEA;FIN TECH S.R.L. 发明人 BALDACCHINI, GIUSEPPE;MONTEREALI, ROSA, MARIA;BONFIGLI, FRANCESCA;FLORA, FRANCESCO;PACE, ANGELO;FAENOV, ANATOLY, YAKOVLEVICH;PIKUZ, TATIANA;REALE, LUCIA
分类号 G01N23/223;G21K7/00;(IPC1-7):G01N23/223 主分类号 G01N23/223
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