A METHOD FOR DETECTION OF MICROMETRIC AND SUB-MICROMETRIC IMAGES BY MEANS OF IRRADIATION OF A MASK OR OF A BIOLOGICAL SPECIMEN WITH IONIZING RADIATION
摘要
Described herein is a method for detection of micrometric and sub-micrometric images with high resolution and high dynamics contrast, and suited for enabling microradiography, x-ray microscopy and the production of coloured configurations in dielectric materials. The method consists of radiation of energy comprised between 20 and 2000 eV for irradiating a mask or a biological specimen and use of a detector consisting of LiF in the form of a crystal or a film. The power of the radiation released in the LiF detector during exposure is preferably >=10 mW/cm<SUP>3</SUP>.
申请公布号
EP1518108(A1)
申请公布日期
2005.03.30
申请号
EP20030741078
申请日期
2003.06.27
申请人
ENTE PER LE NUOVE TECNOLOGIE, L'ENERGIA E L'AMBIENTE - ENEA;FIN TECH S.R.L.