METHOD FOR FORMING SHALLOW TRENCH ISOLATION OF SEMICONDUCTOR ELEMENT,申请号KR20020053194-传众专利搜索

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发明名称	METHOD FOR FORMING SHALLOW TRENCH ISOLATION OF SEMICONDUCTOR ELEMENT
摘要
申请公布号	KR100479980(B1)	申请公布日期	2005.03.30
申请号	KR20020053194	申请日期	2002.09.04
申请人		发明人
分类号	H01L21/762;(IPC1-7):H01L21/762	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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