发明名称 |
Method of fabrication of electronic devices using microfluidic channels |
摘要 |
A structure and method of using microfluidic channels to form an array of semiconductor devices is described. The microfluidic channels have been found to be particularly useful when formed in a self aligned process and used to interconnect a series of thin film transistor (TFT) devices.
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申请公布号 |
US6872588(B2) |
申请公布日期 |
2005.03.29 |
申请号 |
US20020303551 |
申请日期 |
2002.11.22 |
申请人 |
PALO ALTO RESEARCH CENTER INC. |
发明人 |
CHABINYC MICHAEL L.;WONG WILLIAM S.;STREET ROBERT A.;PAUL KATERI E. |
分类号 |
G03F7/20;H01L21/336;H01L27/28;H01L29/786;H01L51/00;H01L51/05;H01L51/40;(IPC1-7):H01L51/40 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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