发明名称 Method of fabrication of electronic devices using microfluidic channels
摘要 A structure and method of using microfluidic channels to form an array of semiconductor devices is described. The microfluidic channels have been found to be particularly useful when formed in a self aligned process and used to interconnect a series of thin film transistor (TFT) devices.
申请公布号 US6872588(B2) 申请公布日期 2005.03.29
申请号 US20020303551 申请日期 2002.11.22
申请人 PALO ALTO RESEARCH CENTER INC. 发明人 CHABINYC MICHAEL L.;WONG WILLIAM S.;STREET ROBERT A.;PAUL KATERI E.
分类号 G03F7/20;H01L21/336;H01L27/28;H01L29/786;H01L51/00;H01L51/05;H01L51/40;(IPC1-7):H01L51/40 主分类号 G03F7/20
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