APPARATUS AND METHOD FOR FEMTO-SECOND LASER MACHINING

摘要

A precision processing device utilizing a femto-second laser and a method thereof are provided to increase processing efficiency by alternating a stage-shifting type with a scanner type according to size of a workpiece and asked precision and to improve cleanliness and minimize thermal or physical deformation by forming an effective vacuum chamber for the workpiece in a workpiece supporting unit. A laser processing device for precisely manufacturing a work-piece(14) with a femto-second laser comprises a lasing unit(1) generating the femto-second laser; a laser beam transmitting unit sending the femto-second laser generated at the lasing unit; and a laser processing station composed of a beam concentrating unit(8) collecting the laser beam sent from the laser beam transmitting unit and a work-piece supporting unit(15) fixing and supporting the work-piece on a focus of the laser beam coming out of the beam concentrating unit. The laser beam transmitting unit is composed of beam dividers(2, 6) splitting the laser beam into at least two paths. The laser processing station is composed of a first and a second laser processing station, respectively, having one beam concentrating unit and one work-piece supporting unit to process with the laser beam transferred through each laser path. The first laser processing station is composed of a first beam concentrating unit, a first work-piece supporting unit, and a first shifting stage(12) to process the work-piece with moving. The second laser processing station is composed of a beam deflecting unit, a second beam concentrating unit, and a second work-piece supporting unit to fix the work-piece and process by yawing the laser beam at the beam deflecting unit.