| 摘要 |
A stage apparatus includes a first stage, having a first linear motor portion with an iron core, for moving a first table, to move the first table with respect to a base table by driving the first linear motor portion, a second stage having a second linear motor portion connected to the first table and a second table, to move the second table, and an electromagnetic coupling provided between the first and second tables to apply an accelerating force to the second table in accordance with acceleration or deceleration of the first linear motor.
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