发明名称 Liquid-phase growth process and liquid-phase growth apparatus
摘要 A liquid-phase growth process comprising immersing a base substrate in a solution containing reactant species to be grown dissolved therein which is accommodated in a crucible and growing a crystal film on said substrate, characterized in that a capping member is kept afloat on the surface of said solution before said substrate is immersed in said solution and said capping member is subsided in said solution upon immersing said substrate in said solution. A liquid-phase growth apparatus suitable for practicing said liquid-phase growth process.
申请公布号 US6872248(B2) 申请公布日期 2005.03.29
申请号 US20030400636 申请日期 2003.03.28
申请人 CANON KABUSHIKI KAISHA 发明人 MIZUTANI MASAKI;NAKAGAWA KATSUMI;SAITO TETSURO;SHOJI TATSUMI;YOSHINO TAKEHITO;NISHIDA SHOJI
分类号 C30B19/06;C30B29/06;H01L21/208;(IPC1-7):C30B19/04;C30B19/10 主分类号 C30B19/06
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