发明名称 Semiconductor memory device having cylinder-type stacked capacitor and method for fabricating such a semiconductor memory device
摘要 The semiconductor memory device comprises a glue layer defining a cylinder shell, a bottom electrode made of a material of the platinum group and covering the inner face and the outer face of the cylinder shell, a dielectric layer formed over the bottom electrode, and a top electrode positioned over the dielectric layer. The bottom electrode, the dielectric layer, and the top electrode comprise a cell capacitor.
申请公布号 US6873002(B2) 申请公布日期 2005.03.29
申请号 US20030337379 申请日期 2003.01.07
申请人 FUJITSU LIMITED 发明人 NISHIKAWA NOBUYUKI
分类号 H01L21/8242;H01L21/02;H01L21/8246;H01L27/105;H01L27/108;(IPC1-7):H01L27/108;H01L29/76;H01L29/94;H01L31/119 主分类号 H01L21/8242
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