| 摘要 |
A flow sensor and a flow rate measuring method are disclosed, in which an error caused by dust attached to the flow sensor is accurately corrected taking advantage of the fact that the output characteristic of the flow sensor representing the relation between the temperature measured by a temperature measuring unit and the flow rate of the fluid undergoes a change with the dust attached. The flow sensor includes a thin-film bridge unit formed on a substrate, a heater arranged on the bridge unit, and a temperature measuring unit arranged on the bridge unit.
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