| 摘要 |
A semiconductor fabrication apparatus having a balance sensing function of a bottom electrode is provided to determine an abnormal state and reduce a process error rate by checking periodically a horizontal state of the bottom electrode. A bottom electrode(50) is installed at a lower side of a process chamber(10). A chuck is installed at a top side of the bottom electrode. A wafer is loaded on the chuck. An elevation unit(70) is used for elevating the bottom electrode. A vertical sensor(90) is used for checking automatically a vertical state of the bottom electrode. The elevation unit includes a driving motor(71), a power transmission part(73) for transmitting the power of the driving motor, a lead screw(75) rotated by the power of the power transmission part, a fixing plate(77) for fixing a lower side of the lead screw, a transfer plate(78) elevated according to a rotating operation of the lead screw, and a transfer part(79) installed at a top side of the transfer plate.
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