| 摘要 |
An apparatus for testing and repairing a TFT(Thin Film Transistor) substrate is provided to perform processes of testing and repairing the TFT(Thin film Transistor) substrate in the same apparatus, to thereby reduce processing time and minimize the installation space of the apparatus. An apparatus for testing and repairing a TFT substrate includes a stage(10) on which the TFT substrate is mounted, a test part(30), a repair part(60), a driver, and a controller. The test part has a probe(32) that electrically comes into contact with circuits of the TFT substrate to test open and short-circuit states of the circuits of the TFT substrate. The repair part includes at least one of an open repair unit that connects an open circuit of the TFT substrate and a short-circuit repair unit that opens a short-circuited circuit of the TFT substrate. The driver moves the stage and the corresponding repair unit such that the corresponding repair unit is located corresponding to a defective portion of the TFT substrate. The controller controls the driver to locate the corresponding repair unit at the defective portion of the TFT substrate in response to information of the defective portion, received from the test part.
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