SEM sample holder apparatus for implementing enhanced examination of multiple samples

摘要

A method and a scanning electron microscope (SEM) holder apparatus are provided for implementing examination of multiple samples. The SEM holder apparatus includes a metal plate. The metal plate includes a plurality of through holes arranged in a predefined pattern, a mounting opening, and an O-ring receiving recess extending within the metal plate to the plurality of through holes. The SEM holder apparatus includes a plurality of sample holders, each inserted within a selected one of the plurality of through holes. An O-ring is inserted within the O-ring receiving recess to provide a secure mounting of the plurality of sample holders. The O-ring protrudes partially into the through holes receiving the sample holders, providing positive holding pressure that ensures a secure mounting of the sample holders to provide electrical conductivity and vibration suppression.