SUBSTRATE COOLING DEVICE OF LOAD LOCK DEVICE

摘要

A substrate cooling device of a load lock apparatus is provided to stably operate three cooling plates by preventing an air pressure for driving the cooling plates from being supplied to the cooling plates when one of the three cooling plates is controlled to be erroneously moved. A cooling device(10) for cooling down a substrate passing through a load lock apparatus includes the first, second and third cooling plates(20,30,40). The second cooling plate is located under the first cooling plate. The third cooling plate is placed under the second cooling plate. One of the first, second and third cooling plates is relatively fixed with respect to the other cooling plates. The other two cooling plates are vertically moved in a direction to the fixed cooling plate or in the opposite direction. The substrate is located between the first and second cooling plates or between the second and third cooling plates to be cooled.