| 摘要 |
A vibration sensor is provided to improve a shock-resistant characteristic while reducing a size thereof by forming an elastic supporter for connecting a vibration layer to a fixing section. A vibration sensor(1) includes a fixing electrode(2) and a vibration electrode(3). The vibration electrode(3) includes a vibration layer(3b) having a slot(3a), a fixing section(3c) formed at a peripheral portion of the vibration electrode(3), and an elastic support section(3d) for connecting the vibration layer(3b) to the fixing section(3c). An amplifying circuit is provided at an output section of the vibration electrode(3). The vibration sensor(1) has a case member(7) formed at an inner surface thereof with an electric member(4).
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