Apparatus and method for extracting impurities on a substrate,申请号KR20020082413-传众专利搜索

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发明名称	Apparatus and method for extracting impurities on a substrate
摘要
申请公布号	KR100479308(B1)	申请公布日期	2005.03.28
申请号	KR20020082413	申请日期	2002.12.23
申请人		发明人
分类号	H01L21/02;B08B7/00;B08B7/04;G01N1/32;G01N1/40;G01N33/00;G01N35/00;H01L21/00;(IPC1-7):H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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