| 摘要 |
FIELD: laser engineering. ^ SUBSTANCE: proposed excimer laser that can be used for intracavitary therapy in medicine, for microelectronics, laser chemistry, and processes using heavy-power ultraviolet rays has electrode system, pulse power circuit with storage capacitor, and switch in the form of thyratron. Electrode system has insulating plate that carries electrodes; thyratron is connected in series with storage capacitor and electrode system. Electrode system is designed to ensure pumping of excimer gas medium with discharge creeping over insulating plate surface. ^ EFFECT: enhanced pulse repetition rate, reduced gas medium consumption. ^ 1 cl, 2 dwg |
