发明名称 Method and apparatus for providing an antireflection coating on the output facet of a photonic integrated circuit (PIC) chip
摘要 An on-chip photodiode is provided in a photonic integrated circuit (PIC) on a semiconductor chip to monitor or check for antireflection qualities of an AR coating applied to the front facet of the semiconductor chip.
申请公布号 US2005063636(A1) 申请公布日期 2005.03.24
申请号 US20040987807 申请日期 2004.11.11
申请人 INFINERA CORPORATION 发明人 JOYNER CHARLES H.
分类号 G02B6/12;G02B6/34;G02F1/017;H01L31/12;H01S3/00;H01S3/13;H01S5/00;H01S5/026;H01S5/0625;H01S5/0683;H01S5/12;H01S5/20;H01S5/22;H01S5/34;H01S5/40;H01S5/50;H04B10/00;H04B10/04;H04B10/145;H04B10/17;H04J14/02;(IPC1-7):G02B6/12 主分类号 G02B6/12
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