发明名称 |
Method and apparatus for providing an antireflection coating on the output facet of a photonic integrated circuit (PIC) chip |
摘要 |
An on-chip photodiode is provided in a photonic integrated circuit (PIC) on a semiconductor chip to monitor or check for antireflection qualities of an AR coating applied to the front facet of the semiconductor chip.
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申请公布号 |
US2005063636(A1) |
申请公布日期 |
2005.03.24 |
申请号 |
US20040987807 |
申请日期 |
2004.11.11 |
申请人 |
INFINERA CORPORATION |
发明人 |
JOYNER CHARLES H. |
分类号 |
G02B6/12;G02B6/34;G02F1/017;H01L31/12;H01S3/00;H01S3/13;H01S5/00;H01S5/026;H01S5/0625;H01S5/0683;H01S5/12;H01S5/20;H01S5/22;H01S5/34;H01S5/40;H01S5/50;H04B10/00;H04B10/04;H04B10/145;H04B10/17;H04J14/02;(IPC1-7):G02B6/12 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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