发明名称 Method of fixing a sealing object to a base object
摘要 A sealing-object (4) is fixed to a base-object (10). The sealing-object comprises a through-hole (5). The objects are fixed to each other in the following manner. In a preparation step, a fixing layer (1, 2, 3) is provided between the base-object and the sealing-object. In addition an evacuation device (6) equipped with an evacuation channel (7) is placed onto the sealing-object. The through-hole of the sealing object has a first extremity opening out on the evacuation channel and a second extremity opening out on the fixing layer. In a fixing step, the fixing layer is heated which causes the fixing layer to release gas. The gas is at least partially evacuated via the through-hole of the sealing-object and the evacuation channel of the evacuation device.
申请公布号 US2005061431(A1) 申请公布日期 2005.03.24
申请号 US20040494877 申请日期 2004.11.16
申请人 BONVALOT BEATRICE;BARBE SYLVIE;LE MOULLEC LAURENT;LEYDIER ROBERT 发明人 BONVALOT BEATRICE;BARBE SYLVIE;LE MOULLEC LAURENT;LEYDIER ROBERT
分类号 H01L21/58;H01L21/98;(IPC1-7):B32B31/00 主分类号 H01L21/58
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