| 摘要 |
The invention relates to an electron cyclotron resonance (ECR) plasma source having a linear plasma discharge opening (9, 27, 28, 30), comprised of a plasma chamber, inside of which a centered wave distributor is provided, and having a multi-pole magnetic field arrangement in the area of the linear plasma discharge opening. The centered wave distributor consists of at least two separate wave distributors (3, 4) that are placed inside a respective partial plasma chamber (1, 2, 21, 22, 32, 23). A linear partial plasma discharge opening (7, 8, 23, 24, 34, 35) and multi-pole magnetic field arrangements (10, 11, 38, 39) are provided on each partial plasma chamber (1, 2, 21, 22, 32, 23). The at least two linear plasma discharge openings (7, 8, 23, 24, 34, 35) are arranged with regard to one another in such a manner that, together, they form at least one plasma discharge opening (9, 27, 28, 30) of the ECR plasma source. |
