发明名称 FLY'S EYE CONDENSER AND ILLUMINATION SYSTEM THEREWITH
摘要 A fly's eye condenser (15) for converting an input light distribution into an output light distribution has at least one raster arrangement of optical groups (21, 22), of which at least some comprise means (30) suitable for changing polarization. The fly's eye condenser thus permits specific, location-dependent control of the polarization state of the output light distribution. If the fly's eye condenser is used in an illumination system (10), then it can be used not only to homogenize the light distribution on the illumination plane of the illumination system but, at the same time, a location-dependent or angle-dependent polarization distribution can also be set in the said illumination plane.
申请公布号 WO2005026822(A2) 申请公布日期 2005.03.24
申请号 WO2004EP10259 申请日期 2004.09.14
申请人 CARL ZEISS SMT AG;KOEHLER, JESS 发明人 KOEHLER, JESS
分类号 G02B5/30;G02B27/28;G03F7/20 主分类号 G02B5/30
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