| 摘要 |
<P>PROBLEM TO BE SOLVED: To supply almost fixed rated power according to widely varying load impedance. <P>SOLUTION: The sputtering system comprises: a d.c. power source 1; an inverter 2 converting d.c. voltage to a.c. voltage; a matching circuit 10 transforming the a.c. voltage; a rectifier 4 converting the transformed a.c. voltage into d.c. voltage; and a sputtering load 6. The matching circuit 10 comprises: a transformer 3 transforming the a.c. voltage from the inverter 2 ; an inductance L provided in series with at least one of a primary winding 31 and a second winding 32; and a capacitor C provided in parallel with at least one of the primary winding 31 and the secondary winding 32. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
