| 摘要 |
PROBLEM TO BE SOLVED: To provide a new molecular device relating to a monomolecular layer on a silicon substrate surface, its structure and the control of functions useful as the core base technology of a nano control device and nano fabrication, and its manufacturing method. SOLUTION: A hydrogen-terminated silicon substrate surface is made to react with the hydrocarbon of a prescribed carbon chain length having end carbon-carbon unsaturated bonding, the monomolecular layer of the hydrocarbon bonded by silicon carbon covalent bonding is formed, and withstand voltage characteristics are varied by the carbon chain length of the hydrocarbon. Also, for MIS bonding constituted with a fine probe, electric resistance is varied by a pressure applied to the fine probe. COPYRIGHT: (C)2005,JPO&NCIPI |
