| 摘要 |
PROBLEM TO BE SOLVED: To provide an adjustment method or the like of an illumination optical system which reduces failure of telecentricity of the illumination optical system. SOLUTION: The illumination optical system IS comprises a light source 1. Movable mirrors 2, 6, 9 which deflect incident light flux are arranged on an optical path between the light source 1 and a second fly eye lens 10. A second zoom optical system 8 is arranged between the first fly eye lens 7 and the second fly eye lens 10. Failure of illumination telecentricity of light flux directed to an irradiated surface LP or an incidence surface PL3 of the second fly eye lens 10 which is optically conjugate with the irradiated surface LP is corrected by adjusting the angle of movable mirrors 2, 6, 9 and at least one of positions of a lens 8a contained in the second zoom optical system 8 in a direction crossing an optical axis AX2. COPYRIGHT: (C)2005,JPO&NCIPI |
