| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device that facilitates the perfect transfer and perfect readout of charge without deteriorating image quality. SOLUTION: The semiconductor device has a transfer channel 12 for transferring charge accumulated by photoelectric conversion, an insulating film 13 formed on the transfer channel 12, and a transfer electrode 15 for applying a transfer voltage to the transfer channel 12 via the insulating film 13, wherein the insulating film 13 has a first thickness and a second thickness smaller than the first thickness, the thickness of the insulating film 13 is the first thickness below the end of the transfer electrode 15 in a direction perpendicular to the transfer direction of the transfer channel 12, and the thickness of the insulating film 13 is the second thickness over a central portion of the transfer channel 12 in the direction perpendicular to the transfer direction of the transfer channel 12. COPYRIGHT: (C)2005,JPO&NCIPI
|
