| 摘要 |
PROBLEM TO BE SOLVED: To provide a ferroelectric, capable of preventing a polarization property of a ferroelectric capacitor to a crystal grain size difference of the ferroelectric from deteriorating and which will not produce deterioration, even if a capacitor size is reduced accompanying microfabrication of a device, a capacitive element using the ferroelectric, and to provide a method of manufacturing the ferroelectric and the capacitive element. SOLUTION: The ferroelectric capacitive element is provided with an insulating film 13a formed on a substrate 1, a lower electrode 5 embedded in the insulating film 13a so that at least a part of a front surface of the lower electrode 5 is exposed, a ferroelectric film 12 formed so as to extend over the insulating film 13a and the lower electrode 5, and an upper electrode 7 formed on the ferroelectric film 12. A crystal grain size of the ferroelectric film 12 is formed almost uniformly on the insulating film 13a contacting with the ferroelectric and on the lower electrode 5. COPYRIGHT: (C)2005,JPO&NCIPI
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