| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle fixing device, a charged particle fixing method and a microarray capable of increasing the bonding amount of DNA or the like by enlarging the surface area capable of fixing and bonding particles onto the liquid phase carrier surface, and fixing the particles electrostatically on a substrate. SOLUTION: This charged particle fixing device is constituted by forming matrically on a semiconductor substrate a plurality of independently-drivable MOSFET's, for example, an N-type region source 3 and a drain 4 formed on a P-type silicon substrate 2, a source electrode 5 in contact with the source 3 and a drain electrode 6 in contact with the drain comprising aluminium respectively, an insulating film 7 formed on the surface of the P-type silicon substrate 2, and an N-channel MOSFET comprising a gate electrode 8 comprising aluminium, in contact with the insulating film 7 between the source 3 and the drain 4. This charged particle fixing method and this microarray using the device are also provided. COPYRIGHT: (C)2005,JPO&NCIPI
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