发明名称 MAGNETORESISTIVE RAM DEVICE AND METHODS FOR FABRICATING
摘要 A method for fabricating an MRAM device structure (10) includes providing a substrate (12) on which is formed a first transistor (14) and a second transistor (14). An operative memory element device (60) is formed in electrical contact with the first transistor (14). At least a portion of a false memory element device (58) is formed in electrical contact with the second transistor (14). A first dielectric layer (62) is deposited overlying the at least a portion of a false memory element device and the operative memory element device. The first dielectric layer is etched to simultaneously form a first via (66) to the at least a portion of a false memory element device (58) and a second via (64) to the operative memory element device (60). An electrically conductive interconnect layer (68) is deposited so the electrically conductive interconnect layer extends from the at least a portion of a false memory element device (58) to the operative memory element device (64).
申请公布号 WO2004095459(A3) 申请公布日期 2005.03.24
申请号 WO2004US11864 申请日期 2004.04.16
申请人 FREESCALE SEMICONDUCTOR, INC.;GRYNKEWICH, GREGORY;DEHERRERA, MARK;DURLAM, MARK, A.;TRACY, CLARENCE, J. 发明人 GRYNKEWICH, GREGORY;DEHERRERA, MARK;DURLAM, MARK, A.;TRACY, CLARENCE, J.
分类号 G11C;G11C8/02;H01L21/00;H01L21/8246;H01L27/22;H01L29/00;H01L29/82 主分类号 G11C
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