APPARATUS FOR ROTATING COATED BODY IN SPUTTERING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for rotating a coated body, which is installed in sputtering equipment and rotates the coated body during sputtering for three-dimensionally and evenly depositing a target on the surface of the coated body.

SOLUTION: The apparatus 10 for rotating the coated body is installed in the sputtering equipment to change the orientation of the coated body. The apparatus is equipped with: a tray 11 on which the coated body is held; a tray-supporting means 12 which is placed at the edge of the tray for supporting the tray in a slanted manner; a protruding part 13 at the edge of the tray, a rotating plate 14 which rotates in the circumferential direction; and a protruding part 15 at the edge of the rotating plate. When the rotating plate rotates, the protruding part 15 at the edge of the rotating plate contacts the protruding part at the edge of the tray.

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