| 摘要 |
PROBLEM TO BE SOLVED: To provide a position and attitude measuring instrument capable of measuring precisely six axes of a position and an attitude of a measuring face at the same time. SOLUTION: A plurality of grooves is formed on the measuring face 4 to serve as a diffraction part 7. Light is emitted from a light source 3 toward the diffraction part 7 to detect primary diffraction light generated by the diffraction part 7, by photoreception elements 1, 2. A relative distance between the photoreception elements 1, 2 and the measuring face is changed to detect the diffraction lights at least twice. A computation processing part 61 computes the center brightness position of the diffraction light detected in each of the relative distances, optical axes of the diffraction lights incident into the photoreception elements 1, 2 are found respectively based on the center brightness positions, and the position and attitude of the measuring face 4 are calculated based on the two obtained optical axes and an irradiation (emission) axis of the light source 3. COPYRIGHT: (C)2005,JPO&NCIPI
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