APPARATUS FOR DETERMINING TWO SIDES OF CRYSTAL AND APPARATUS FOR DETERMINING CRYSTAL SLOPE ORIENTATION

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for determining two sides of a crystal, which can determine the two sides of a wafer in a short period of measurement time. SOLUTION: The wafer 1 is interposed among three pins to be positioned and fixed to a support base 2 so that a notch 1a of the wafer 1 is engaged to a movable pin 4. A plane perpendicular to the notch orientation 12 is set as an irradiation plane 13, and a measurement point M is irradiated with X-rays 8 along the irradiation plane 13, and the surface or rear side of the wafer 1 is determined, based on outputs from an X-ray detector 10 of a detecting section which is disposed out of the irradiation plane 13 and detects diffraction X-rays. COPYRIGHT: (C)2005,JPO&NCIPI