| 摘要 |
PROBLEM TO BE SOLVED: To easily perform the work of positioning a handler and a test head part at the replacement of a test board. SOLUTION: This apparatus for inspecting semiconductor integrated circuits is provided with the test head part 1 of a tester supplied with a semiconductor integrated circuit; a test board holding part 2 for mounting the test board 3 for inspecting the semiconductor integrated circuit which can be attached to and removed from the test head part 1: and a floating mechanism 4 provided for connecting the test board holding part 2 to the test head part 1. It is thereby possible to freely move the test board holding part 2, to which the test board 3 provided with a device socket is mounted, in the horizontal, vertical, and oblique directions within a prescribed range by the floating mechanism 4. It is also possible to easily and finely position the fitting location of the integrated circuit to be measured by the handler and the device socket, since it is also possible to reduce both the weight of the test board holding part 2 and its force of inertia. COPYRIGHT: (C)2005,JPO&NCIPI
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