| 发明名称 |
FORMING METHOD OF CONDUCTIVE FILM PATTERN, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a conductive film pattern by well modifying a conductive thin film on a base plate without subject to quality of materials of the base plate. SOLUTION: A laser beam is irradiated on the base plate 1 having a conductive layer 3 including a conductive material and a photothermal conversion layer 2 including a photothermal conversion material converting light energy into thermal energy, and at least a part of the conductive layer 3 is baked with the use of the photothermal conversion material. COPYRIGHT: (C)2005,JPO&NCIPI
|
| 申请公布号 |
JP2005079010(A) |
申请公布日期 |
2005.03.24 |
| 申请号 |
JP20030310071 |
申请日期 |
2003.09.02 |
| 申请人 |
SEIKO EPSON CORP |
发明人 |
TOYODA NAOYUKI |
| 分类号 |
G03F7/00;C23C18/14;G02F1/1343;H01B13/00;H01L21/28;H01L21/285;H01L21/288;H01L21/302;H01L21/3205;H01L21/44;H01L21/461;H01L21/768;H05B33/10;H05B33/12;H05B33/26;H05K1/09;H05K3/02;H05K3/04;H05K3/20;(IPC1-7):H01B13/00;H01L21/320 |
主分类号 |
G03F7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
