Method of analyzing material structure using CBED

摘要

Provided is a method of analyzing a material structure by CBED using a TEM in which structure information such as a stress distribution and the like is analyzed by converging an electron beam on a local area of the specimen. The method includes: (a) detecting experiment HOLZ lines from a diffraction pattern; (b) varying TEM experimental parameters and lattice constants to detect theoretical HOLZ lines by modeling the detected experiment HOLZ lines; and (c) comparing the theoretical HOLZ lines with the experimental HOLZ lines to determine the lattice constants of the specimen.