| 发明名称 |
Structure and method for improved adhesion between two polymer films |
| 摘要 |
A method for improving the adhesion between polyimide layers and the structure formed by the method. A silicon oxide-containing layer is formed on the surface of a polyimide layer and a second layer of polyimide is formed on the silicon oxide-containing layer.
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| 申请公布号 |
US2005064199(A1) |
申请公布日期 |
2005.03.24 |
| 申请号 |
US20040985455 |
申请日期 |
2004.11.10 |
| 申请人 |
EGITTO FRANK D.;MATIENZO LUIS J. |
发明人 |
EGITTO FRANK D.;MATIENZO LUIS J. |
| 分类号 |
C08J5/12;H01L21/312;H01L21/316;H01L21/768;(IPC1-7):B32B9/04 |
主分类号 |
C08J5/12 |
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