发明名称 |
Stack-film trench capacitor and method for manufacturing the same |
摘要 |
A trench capacitor includes an electrode having a first conductive area formed in a trench provided in a substrate, and a second conductive area extending from a bottom of the trench, the second conductive area being electrically coupled to the first conductive area and spaced apart from the first conductive area; a storage node having a first conductive extension extending into a first dielectric space provided between the first conductive area and the second conductive area of the electrode, and a second conductive extension extending into a second dielectric space provided within the second conductive area of the electrode; and a dielectric layer electrically insulating the electrode from the storage node.
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申请公布号 |
US2005062090(A1) |
申请公布日期 |
2005.03.24 |
申请号 |
US20040965160 |
申请日期 |
2004.10.15 |
申请人 |
PROMOS TECHNOLOGIES, INC. |
发明人 |
LIAN YU-YING |
分类号 |
H01G4/228;H01L21/02;H01L21/334;H01L21/8242;H01L21/8249;H01L27/108;H01L29/76;(IPC1-7):H01L21/824 |
主分类号 |
H01G4/228 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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