DIAPHRAGM DEVICE AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent the generation of an absorbent and to prevent the harmful effect over the imaging characteristics by the shielded luminous flux. SOLUTION: A shield sectioning 51 which shields at least part of the luminous flux is provided. The shielding section 51 has reflecting surfaces 50a, 50b which reflect the reached luminous flux so as to allow the intensity of the reflected light to the outside of an optical path space K to be higher than that of the reflected light to the optical path space K of the luminous flux. COPYRIGHT: (C)2005,JPO&NCIPI