ELECTRON BEAM MEASURING DEVICE AND ELECTRON BEAM MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electron beam measuring device for converting an image photographed in a certain photographing posture into an image photographed in a photographing posture suitable for an purpose of use. SOLUTION: The device has a reference image selecting part 40 selecting either of right or left images of a stereoscopic image obtained from an electron beam detection part 4; a first correction coefficient measuring part 44 obtaining a first image correction coefficient to bring a non-reference image into an image deflection state of the reference image for the non-reference image of the right and the left images by using the reference image and by using a correspondent relation of the right and left images; a first image conversion part 46 image-converting the non-reference image by using the first coefficient; an image coordinate conversion part 48 coordinate-converting the reference image and image-converted non-reference image into an image in a reference state of a relatively inclined angle of a sample inclined part 5; and a coordinate measuring part 52 obtaining a shape or a coordinate value of the sample photographed in a stereoscopic image by making the coordinate-converted non-reference image and reference image be the stereoscopic image. COPYRIGHT: (C)2005,JPO&NCIPI