| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-Y stage for easily realizing the squareness between X and Y axes. SOLUTION: The X-Y stage comprises a saddle 1 having second and third openings 12 that orthogonally cross a first opening 10 that is open while penetrating in the direction of the X axis and are formed in parallel with each other, an X guide cylinder 2 inserted into the opening 10 in which the saddle 1 can travel on the X axis, first and second straight Y guide cylinders 3, 4 each of which keeps one end inserted into the second and third openings 11, 12 of the saddle 1, a retaining body 5 for retaining the other end of each of the first and second Y guide cylinders 3, 4 for retaining the first and second Y guide cylinders 3, 4 in a parallel state, and a supporting means 6 for supporting the retaining body 5 so that it can travel in the direction of the X axis. The other end of the first and second Y guide cylinders 3, 4 is retained by the retaining means 6, the insertion length of the first and second Y guide cylinders 2, 3 into the second third openings 11, 12 is adjusted, and the squareness between the travel trace on the Y-axis of the stage 7 and the X axis is adjusted. COPYRIGHT: (C)2005,JPO&NCIPI
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