| 摘要 |
PROBLEM TO BE SOLVED: To provide a nano/micro machine designing/machining method for shortening the development period and reducing the development cost of a nano/micro machine. SOLUTION: The nano/micro machine designing/machining method is composed of process design, machining database, machining pattern formation and machining processes. The process from process design to machining pattern formation includes a reverse problem simulation process for obtaining a machining process and a machining pattern from designed device structure. COPYRIGHT: (C)2005,JPO&NCIPI
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