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发明名称
A method for crystallizing of an amorphous Si
摘要
申请公布号
KR100478757(B1)
申请公布日期
2005.03.24
申请号
KR20020021022
申请日期
2002.04.17
申请人
发明人
分类号
C30B13/22;(IPC1-7):C30B13/22
主分类号
C30B13/22
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