ELECTROSTATIC MICRO-ACTUATOR AND OPTICAL SWITCH

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic micro-actuator having a latching function of holding a movable part in a displaced state with a relatively small area, and an optical switch. SOLUTION: This electrostatic micro-actuator has: a movable plate; a flexible supporting arm for supporting the movable plate and displacing it in a fixed direction; a first driving part for driving the movable plate in the fixed direction; a first fitting member connected to the movable plate; a second fitting member for holding the first fitting member in a state of being displaced in the fixed direction; a movable electrode disposed almost parallel with the fixed direction and connected to the second fitting member; and a fixed electrode disposed almost parallel with the movable electrode and driving the movable electrode by electrostatic attracting force generated between the movable electrode and the fixed electrode, to release the state held by the second fitting member. COPYRIGHT: (C)2005,JPO&NCIPI