| 摘要 |
An apparatus includes an optical system having a first element and a second element, and a support member which supports the optical system. The apparatus further includes a first control system which includes the first element and feedback-controls a position of the first element, and a second control system which includes the second element and feedback-controls a position of the second element. The first control system and the second control system are arranged such that a difference between a first transfer function between a displacement of the support member and a displacement of the first element and a second transfer function between the displacement of the support member and a displacement of the second element is not greater than {fraction (1/10 with respect to at least a limited frequency band.
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