| 摘要 |
An imaging apparatus comprising: a radiation system for providing a projection beam of radiation; a support structure for supporting programmable patterning means, the programmable patterning means serving to pattern the projection beam according to a desired pattern; a substrate table for holding a substrate; a projection system for projecting the patterned beam onto a target portion of the substrate, wherein the apparatus further comprises: beam splitting means, provided between the programmable patterning means and the substrate table, serving to divert aside a portion of the patterned beam; image detection means, for analyzing said portion of the patterned beam.
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