发明名称 |
METHOD FOR GENERATING IMAGE DRAWING DATA |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method capable of preventing a step difference between patterns from being unnecessarily too small or too large after division of an image so as to reduce an image drawing time and enhance the image drawing accuracy in the case of generating image drawing data from design data. <P>SOLUTION: In the image drawing data generating method wherein a pattern 11 with a slope whose angle is an optional angle other than an integer multiple of 45 degrees in the design data is slit into patterns 12 with a rectangle or a trapezoid with a slope with an angle of 45 degrees to generate the image drawing data, the direction of slit division and the kind of division graphics are specified in response to the optional angle and the division width is determined so that step differences between adjacent patterns after slit division are within a prescribed permissible range. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2005079392(A) |
申请公布日期 |
2005.03.24 |
申请号 |
JP20030309139 |
申请日期 |
2003.09.01 |
申请人 |
TOSHIBA MACH CO LTD;TOSHIBA CORP |
发明人 |
HARA SHIGEHIRO;HIGURE HITOSHI;MURAKAMI EIJI;OGAWA YOJI;TSUCHIYA SEIICHI;KASAHARA ATSUSHI |
分类号 |
G03F1/20;G03F1/68;G03F7/20;H01L21/027;(IPC1-7):H01L21/027;G03F1/08 |
主分类号 |
G03F1/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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