发明名称 Apparatus and method for a scanning probe microscope
摘要 The invention concerns a device and a method for a scanning probe microscope, in particular, an atomic force scanning microscope. The invention is characterized in that it comprises a measuring device (100) including a lateral displacement mechanism (1) for displacing a measuring probe (5) in a plane, a vertical displacement mechanism (4) for displacing the measuring probe in a plane perpendicular to said plane, and sample-holder (11) for receiving a sample to be measured (6). An optical path (10) of the condenser is formed through the measuring device (100), so that the sample-holder (11) is arranged in the region of one end of the optical path (10) of the condenser.
申请公布号 US2005061970(A1) 申请公布日期 2005.03.24
申请号 US20040490442 申请日期 2004.09.22
申请人 KNEBEL DETLEF;JAHNKE TORSTEN;SUNWOLDT OLAF 发明人 KNEBEL DETLEF;JAHNKE TORSTEN;SUNWOLDT OLAF
分类号 G01B21/00;G01B21/30;G01Q20/02;G01Q60/06;(IPC1-7):G01N23/00 主分类号 G01B21/00
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