摘要 |
The invention concerns a device and a method for a scanning probe microscope, in particular, an atomic force scanning microscope. The invention is characterized in that it comprises a measuring device (100) including a lateral displacement mechanism (1) for displacing a measuring probe (5) in a plane, a vertical displacement mechanism (4) for displacing the measuring probe in a plane perpendicular to said plane, and sample-holder (11) for receiving a sample to be measured (6). An optical path (10) of the condenser is formed through the measuring device (100), so that the sample-holder (11) is arranged in the region of one end of the optical path (10) of the condenser.
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